EDAMURA Manabu | Mechanical Engineering Research Laboratory, Hitachi, Ltd.

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概要

• 同名の論文著者
• Mechanical Engineering Research Laboratory, Hitachi, Ltd.の論文著者

関連著者

• YOSHIOKA Ken

  Kasado Design Department, Semiconductor Equipment Product Division, Semiconductor Manufacturing Equi

• Doi A

  Mechanical Engineering Research Laboratory Hitachi Ltd.

• Kanai Saburo

  Kasado Division Hitachi High-technologies Corporation

• Mise Nobuyuki

  Mechanical Engineering Research Laboratory Hitachi Ltd.

• EDAMURA Manabu

  Mechanical Engineering Research Laboratory, Hitachi, Ltd.

• NISHIO Ryoji

  Kasado Division, Hitachi High-Technologies Corporation

• KANEKIYO Tadamitsu

  Kasado Division, Hitachi High-Technologies Corporation

• KANNO Seiichiro

  Mechanical Engineering Research Laboratory, Hitachi, Ltd.

• DOI Akira

  Mechanical Engineering Research Laboratory, Hitachi, Ltd.

• KAZUMI Hideyuki

  Hitachi Research Laboratory, Hitachi, Ltd.

• Nishio R

  Hitachi High‐technologies Corp. Yamaguchi Jpn

• Kanno S

  Hitachi Ltd. Ibaraki Jpn

• Kanekiyo Tadamitsu

  Kasado Division Hitachi High-technologies Corporation

• Edamura Manabu

  Mechanical Engineering Research Laboratory Hitachi Ltd.

• Kazumi Hideyuki

  Hitachi Research Laboratory Hitachi Ltd.

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著作論文

• A Novel Plasma Etching Tool with RF-Biased Faraday-Shield Technology : Chamber Surface Reaction Control in the Etching of Nonvolatile Materials

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