KAZUMI Hideyuki | Hitachi Research Laboratory, Hitachi, Ltd.
スポンサーリンク
概要
関連著者
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KAZUMI Hideyuki
Hitachi Research Laboratory, Hitachi, Ltd.
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Kazumi Hideyuki
Hitachi Research Laboratory Hitachi Ltd.
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YOSHIOKA Ken
Kasado Design Department, Semiconductor Equipment Product Division, Semiconductor Manufacturing Equi
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Doi A
Mechanical Engineering Research Laboratory Hitachi Ltd.
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Kanai Saburo
Kasado Division Hitachi High-technologies Corporation
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Mise Nobuyuki
Mechanical Engineering Research Laboratory Hitachi Ltd.
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EDAMURA Manabu
Mechanical Engineering Research Laboratory, Hitachi, Ltd.
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NISHIO Ryoji
Kasado Division, Hitachi High-Technologies Corporation
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KANEKIYO Tadamitsu
Kasado Division, Hitachi High-Technologies Corporation
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KANNO Seiichiro
Mechanical Engineering Research Laboratory, Hitachi, Ltd.
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DOI Akira
Mechanical Engineering Research Laboratory, Hitachi, Ltd.
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Nishio R
Hitachi High‐technologies Corp. Yamaguchi Jpn
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Kanno S
Hitachi Ltd. Ibaraki Jpn
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Kanekiyo Tadamitsu
Kasado Division Hitachi High-technologies Corporation
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Edamura Manabu
Mechanical Engineering Research Laboratory Hitachi Ltd.
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Kazumi Hideyuki
Hitachi Research Laboratory Kasado Works Hitachi Ltd.
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HAMASAKI Ryoji
Hitachi Research Laboratory, Kasado Works, Hitachi, Ltd.
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TAGO Kazutami
Hitachi Research Laboratory, Kasado Works, Hitachi, Ltd.
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Tago Kazutami
Hitachi Research Laboratory Kasado Works Hitachi Ltd.
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Hamasaki Ryoji
Hitachi Research Laboratory Kasado Works Hitachi Ltd.
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Hamasaki Ryoji
794, Higashitoyoi Kudamatsu-shi, Yamaguchi 744, Japan
著作論文
- A Novel Plasma Etching Tool with RF-Biased Faraday-Shield Technology : Chamber Surface Reaction Control in the Etching of Nonvolatile Materials
- Radical and Ion Compositions of BCl_3/Cl_2 Plasma and Their Relation to Aluminum Etch Characteristics