Ikoma Toru | Institute Of Fluid Science Tohoku University
スポンサーリンク
概要
関連著者
-
Samukawa Seiji
Institute Of Fluid Science Tohoku University
-
Endo Kazuhiko
National Inst. Advanced Industrial Sci. And Technol. Ibaraki Jpn
-
Ikoma Toru
Institute Of Fluid Science Tohoku University
-
SAMUKAWA Seiji
Institute of Fluid Science, Tohoku University
-
ENDO Kazuhiko
National Institute of Advanced Industrial Science and Technology
-
MASAHARA Meishoku
National Institute of Advanced Industrial Science and Technology
-
MATSUKAWA Takashi
National Institute of Advanced Industrial Science and Technology
-
Fukuda Seiichi
Institute Of Fluid Science Tohoku University
-
IKOMA Toru
Institute of Fluid Science, Tohoku University
-
TAGUCHI Chihiro
Institute of Fluid Science, Tohoku University
-
WATANABE Heiji
Graduate School of Engineering, Osaka University
-
Taguchi Chihiro
Institute Of Fluid Science Tohoku University
-
Watanabe Heiji
Graduate School Of Engineering Osaka University
-
Masahara Meishoku
National Institute of Advanced Industrial Science and Technology, 2-13 Tsukuba Central, Umezono, Tsukuba, Ibaraki 305-8568, Japan
-
YONEMOTO Masahiro
Institute of Fluid Science, Tohoku University
-
Yonemoto Masahiro
Institute of Fluid Science, Tohoku University, 2-1-1 Katahira, Aoba-ku, Sendai 980-8577, Japan
-
Sano Keisuke
Institute of Fluid Science, Tohoku University, 2-1-1 Katahiara, Aoba-ku, Sendai 980-8577, Japan
-
Sano Keisuke
Institute of Fluid Science, Tohoku University, 2-1-1 Katahira, Aoba-ku, Sendai 980-8577, Japan
-
Ikoma Toru
Institute of Fluid Science, Tohoku University, 2-1-1 Katahira, Aoba-ku, Sendai 980-8577, Japan
著作論文
- Low-Leakage-Current Ultra-thin SiO_2 Film by Low-Temperature Neutral Beam Oxidation
- Low Temperature, Beam-Orientation-Dependent, Lattice-Plane-Independent, and Damage-Free Oxidation for Three-Dimensional Structure by Neutral Beam Oxidation