Saito Shin-ich | Central Research Laboratory Hitachi Ltd.

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概要

• 同名の論文著者
• Central Research Laboratory Hitachi Ltd.の論文著者

関連著者

• Saito Shin-ich

  Central Research Laboratory Hitachi Ltd.

• Saito S

  Central Research Laboratory Hitachi Ltd.

• Sugita K

  Graduate School Of Science And Technology Chiba University

• SAITO Shuichi

  Graduate School of Science and Technology, Chiba University

• SUGITA Kazuyuki

  Graduate School of Science and Technology, Chiba University

• TONOTANI Junichi

  Corporate Manufacturing Engineering Center, Toshiba Corporation

• Tonotani J

  Corporate Manufacturing Engineering Center Toshiba Corporation

• Tonotani Junichi

  Corporate Manufacturing Engineering Center Toshiba Corporation

• Sugita K

  Faculty Of Pharmaceutical Sciences University Of Tokyo

• Hiratani Masahiko

  Central Research Laboratory Hitachi Ltd.

• YAMAGE Masashi

  Corporate Manufacturing Engineering Center, Toshiba Corporation

• TORII Kazuyoshi

  Central Research Laboratory, Hitachi, Ltd.

• SHIMAMOTO Yasuhiro

  Central Research Laboratory, Hitachi, Ltd.

• Torii K

  Central Research Laboratory Hitachi Ltd.

• Torii Kazuyoshi

  Central Research Laboratory Hitachi Lid.

• Torii Kazuyoshi

  Central Research Laboratory Hitachi Ltd.

• Yamage Masashi

  Corporate Manufacturing Engineering Center Toshiba Corporation

• Shimamoto Yasuhiro

  Central Research Laboratory Hitachi Ltd.

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著作論文

• Effect of CHF_3 Addition on Reactive Ion Etching of Aluminum Using Inductively Coupled Plasma
• Formation of Ammonium Salts and Their Effects on Controlling Pattern Geometry in the Reactive Ion Etching Process for Fabricating Aluminum Wiring and Polysilicon Gate
• Effective Electron Mobility Reduced by Remote Charge Scattering in High-K Gate Stacks : Short Note

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