AOYAMA Hirokazu | Chemical Division, DAIKIN Industries, Ltd.
スポンサーリンク
概要
関連著者
-
Hirose Masataka
Advanced Semiconductor Research Center National Institute Of Advanced Industrial Science And Technol
-
AOYAMA Hirokazu
Chemical Division, DAIKIN Industries, Ltd.
-
YOKOYAMA Shin
Research Center for Nanodevices and Systems, Hiroshima University
-
SHIBAHARA Kentaro
Research Center for Nanodevices and Systems, Hiroshima University
-
NAKAMURA Shingo
Chemical Division, DAIKIN Industries, Ltd.
-
ITANO Mitsushi
Chemical Division, DAIKIN Industries, Ltd.
-
Yokoyama Shin
Research Center For Integrated Systems Hiroshima University
-
Yokoyama S
Research Center For Nanodevices And Systems Hiroshima University
-
Shibahara K
Research Center For Nanodevices And Systems Hiroshima University
-
Itano Mitsushi
Chemical Division Daikin Industries Ltd.
-
Hirose Masataka
Advanced Semiconductor Research Center National Institute Of Advanced Industrial Science And Technol
-
Nakamura Shingo
Chemical Division Daikin Industries Ltd.
-
Shibahara Kentaro
Research Center for Nanodevices and Systems, Hiroshima University, 1-4-2, Kagamiyama, Higashi-hiroshima, Hiroshima 739-8527, Japan
-
Shibahara Kentaro
Reseach Center for Nanodevices and Systems, Hiroshima University, 1-4-2 Kagamiyama, Higashihiroshima, Hiroshima 739-8527, Japan
-
Yokoyama Shin
Research Center for Nanodevices and Systems, Hiroshima University, 1-4-2, Kagamiyama, Higashi-hiroshima, Hiroshima 739-8527, Japan
-
Aoyama Hirokazu
Chemical Division, DAIKIN Industries, Ltd., 1-1 Nishi Hitotsuya, Settsu, Osaka 566-8585, Japan
-
Itano Mitsushi
Chemical Division, DAIKIN Industries, Ltd., 1-1 Nishi Hitotsuya, Settsu, Osaka 566-8585, Japan
著作論文
- Comparative Studies of Perfluorocarbon Alternative Gas Plasmas for Contact Hole Etch
- Comparative Studies of Perfluorocarbon Alternative Gas Plasmas for Contact Hole Etch