IIJIMA Tadashi | ULSI Research Laboratories, TOSHIBA Corporation
スポンサーリンク
概要
関連著者
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IIJIMA Tadashi
ULSI Research Laboratories, TOSHIBA Corporation
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SHIMOOKA Yoshiaki
ULSI Research Laboratories, TOSHIBA Corporation
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MINAMIHABA Gaku
ULSI Research Laboratories, TOSHIBA Corporation
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KAWANOUE Takashi
ULSI Research Laboratories, TOSHIBA Corporation
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HIRABAYASHI Hideaki
Manufacturing Engineering Research Center, TOSHIBA Corporation
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OBARA Takashi
Manufacturing Engineering Research Center, TOSHIBA Corporation
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KUBOTA Takeshi
Semiconductor Division, TOSHIBA Corporation
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SHIMIZU Toshio
Semiconductor Division, TOSHIBA Corporation
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KOYAMA Mitsutoshi
Semiconductor Division, TOSHIBA Corporation
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SUGURO Kyoichi
ULSI Research Laboratories, TOSHIBA Corporation
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Ooshima Jiro
Semiconductor Division Toshiba Corporation
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Suguro Kyoichi
Ulsi Research Center Toshiba Corporation
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Tamura H
Tokyo Inst. Technol. Tokyo Jpn
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TAMURA Hitoshi
ULSI Research Laboratories, TOSHIBA Corporation
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SAKURAI Naoaki
Manufacturing Engineering Research Center, TOSHIBA Corporation
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OHKAWA Hideki
Manufacturing Engineering Research Center, TOSHIBA Corporation
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EGAWA Hidemitu
Semiconductor Division, TOSHIBA Corporation
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IDAKA Toshiaki
Semiconductor Division, TOSHIBA Corporation
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OOSHIMA Jiro
Semiconductor Division, TOSHIBA Corporation
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Tamura Hitoshi
Ulsi Process Engineering Lab. Microelectronics Engineering Lab. Toshiba Corp.
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Ohkawa Hideki
Manufacturing Engineering Research Center Toshiba Corporation
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Sakurai Naoaki
Manufacturing Engineering Research Center Toshiba Corporation
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Idaka Toshiaki
Semiconductor Division Toshiba Corporation
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Egawa Hidemitu
Semiconductor Division Toshiba Corporation
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Iijima Tadashi
Microelectronics Engineering Lab. Toshiba Corporation
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Suguro K
Toshiba Corporation Semiconductor Company
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SHIMOOKA Yoshiaki
Microelectronics Engineering Lab., Toshiba Corporation
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Shimooka Yoshiaki
Microelectronics Engineering Lab. Toshiba Corporation
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Suguro Kyoichi
Toshiba Corporation Semiconductor Company
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Suguro Kyoichi
ULSI Research Laboratories, TOSHIBA Corporation, 1, Komukai Toshiba-cho, Saiwai-ku, Kawasaki 210, Japan
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Sakurai Naoaki
Manufacturing Engineering Research Center, TOSHIBA Corporation, 33, Shin-isogocho, Isogo-ku, Yokohama, 235, Japan
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Koyama Mitsutoshi
Semiconductor Division, TOSHIBA Corporation, 1, Komukai Toshiba-cho, Saiwai-ku, Kawasaki 210, Japan
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Tamura Hitoshi
ULSI Research Laboratories, TOSHIBA Corporation, 1, Komukai Toshiba-cho, Saiwai-ku, Kawasaki 210, Japan
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Hirabayashi Hideaki
Manufacturing Engineering Research Center, TOSHIBA Corporation, 33, Shin-isogocho, Isogo-ku, Yokohama, 235, Japan
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Iijima Tadashi
ULSI Research Laboratories, TOSHIBA Corporation, 1, Komukai Toshiba-cho, Saiwai-ku, Kawasaki 210, Japan
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Egawa Hidemitu
Semiconductor Division, TOSHIBA Corporation, 1, Komukai Toshiba-cho, Saiwai-ku, Kawasaki 210, Japan
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Kawanoue Takashi
ULSI Research Laboratories, TOSHIBA Corporation, 1, Komukai Toshiba-cho, Saiwai-ku, Kawasaki 210, Japan
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Ooshima Jiro
Semiconductor Division, TOSHIBA Corporation, 1, Komukai Toshiba-cho, Saiwai-ku, Kawasaki 210, Japan
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Minamihaba Gaku
ULSI Research Laboratories, TOSHIBA Corporation, 1, Komukai Toshiba-cho, Saiwai-ku, Kawasaki 210, Japan
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Shimooka Yoshiaki
ULSI Research Laboratories, TOSHIBA Corporation, 1, Komukai Toshiba-cho, Saiwai-ku, Kawasaki 210, Japan
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Ohkawa Hideki
Manufacturing Engineering Research Center, TOSHIBA Corporation, 33, Shin-isogocho, Isogo-ku, Yokohama, 235, Japan
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Shimizu Toshio
Semiconductor Division, TOSHIBA Corporation, 1, Komukai Toshiba-cho, Saiwai-ku, Kawasaki 210, Japan
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Obara Takashi
Manufacturing Engineering Research Center, TOSHIBA Corporation, 33, Shin-isogocho, Isogo-ku, Yokohama, 235, Japan
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Kubota Takeshi
Semiconductor Division, TOSHIBA Corporation, 1, Komukai Toshiba-cho, Saiwai-ku, Kawasaki 210, Japan
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Idaka Toshiaki
Semiconductor Division, TOSHIBA Corporation, 1, Komukai Toshiba-cho, Saiwai-ku, Kawasaki 210, Japan
著作論文
- Double-Level Cu Inlaid Interconnects with Simultaneously Filled Via Plugs
- Inlaid Cu Interconnects Employing Ti-Si-N Barrier Metal for ULSI Applications
- Double-Level Cu Inlaid Interconnects with Simultaneously Filled Via Plugs