Matsuo J | Fujitsu Lab. Atsugi

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概要

• MATSUO Jiroの詳細を見る
• 同名の論文著者
• Fujitsu Lab. Atsugiの論文著者

関連著者

• Matsuo J

  Fujitsu Lab. Atsugi

• Nakamura M

  Institute Of Advanced Material Study And Department Of Molecular Science And Technology Graduate Sch

• YAMADA Isao

  Ion Beam Engineering Experimental Laboratory, Kyoto University

• Matsuo Jiro

  Ion Beam Engineering Experimental Laboratory Kyoto University

• Matsuo Jiro

  Fujitsu Laboratories

• Akizuki Makoto

  Ion Beam Engineering Experimental Laboratory Kyoto University

• Harada M

  National Res. Inst. Metals Ibaraki Jpn

• Nakamura M

  Toshiba Corp. Yokohama Jpn

• Ogasawara Satoru

  Microelectronics Research Center, SANYO Electric Co., Ltd.,

• Harada Mitsuaki

  Microelectronics Research Center, SANYO Electric Co., Ltd.,

• Doi Atsumasa

  Microelectronics Research Center, SANYO Electric Co., Ltd.,

• Harada Mitsuaki

  Microelectronics Research Center Sanyo Electric Co. Ltd.

• Doi Atsumasa

  Microelectronics Research Center Sanyo Electric Co. Ltd.

• KOSHINO Keiji

  Basic Process Development Division, Fujitsu Ltd.

• Ogasawara Satoru

  Microelectronics Research Center Sanyo Electric Co. Ltd.

• Koshino Keiji

  Basic Process Development Division Fujitsu Ltd.

• Yamada Isao

  Ion Beam Engineering Experimental Laboratory Kyoto University

• NAKAMURA Moritaka

  Basic Process Development Div.

• Nakamura Moritaka

  Process Development Division Fujitsu Limited

• AKIZUKI Makoto

  Microelectronics Research Center, SANYO Electric Co., Ltd.

• KOSHINO Keiji

  Process Development Division, FUJITSU LIMITED

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著作論文

• Low-Temperature Oxidation of Silicon by O_2 Cluster Ion Beams
• A New Low-Temperature Oxidation Technique by Gas Cluster Ion Beams
• Chemical States of Bromine Atoms on SiO_2 Surface after HBr Reactive Ion Etching : Analysis of Thin Oxide
• Mechanism of High Selectivity and Impurity Effects in HBr RIE: In-Situ Surface Analysis

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