Ogasawara Satoru | Microelectronics Research Center Sanyo Electric Co. Ltd.
スポンサーリンク
概要
関連著者
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YAMADA Isao
Ion Beam Engineering Experimental Laboratory, Kyoto University
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Matsuo J
Fujitsu Lab. Atsugi
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Matsuo Jiro
Ion Beam Engineering Experimental Laboratory Kyoto University
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Akizuki Makoto
Ion Beam Engineering Experimental Laboratory Kyoto University
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Harada M
National Res. Inst. Metals Ibaraki Jpn
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Ogasawara Satoru
Microelectronics Research Center, SANYO Electric Co., Ltd.,
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Harada Mitsuaki
Microelectronics Research Center, SANYO Electric Co., Ltd.,
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Doi Atsumasa
Microelectronics Research Center, SANYO Electric Co., Ltd.,
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Harada Mitsuaki
Microelectronics Research Center Sanyo Electric Co. Ltd.
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Doi Atsumasa
Microelectronics Research Center Sanyo Electric Co. Ltd.
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Ogasawara Satoru
Microelectronics Research Center Sanyo Electric Co. Ltd.
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Yamada Isao
Ion Beam Engineering Experimental Laboratory Kyoto University
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AKIZUKI Makoto
Microelectronics Research Center, SANYO Electric Co., Ltd.
著作論文
- Low-Temperature Oxidation of Silicon by O_2 Cluster Ion Beams
- A New Low-Temperature Oxidation Technique by Gas Cluster Ion Beams