Harada Mitsuaki | Microelectronics Research Center, SANYO Electric Co., Ltd.,

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概要

• 同名の論文著者
• Microelectronics Research Center, SANYO Electric Co., Ltd.,の論文著者

関連著者

• YAMADA Isao

  Ion Beam Engineering Experimental Laboratory, Kyoto University

• Matsuo J

  Fujitsu Lab. Atsugi

• Matsuo Jiro

  Ion Beam Engineering Experimental Laboratory Kyoto University

• Akizuki Makoto

  Ion Beam Engineering Experimental Laboratory Kyoto University

• Harada M

  National Res. Inst. Metals Ibaraki Jpn

• Ogasawara Satoru

  Microelectronics Research Center, SANYO Electric Co., Ltd.,

• Harada Mitsuaki

  Microelectronics Research Center, SANYO Electric Co., Ltd.,

• Doi Atsumasa

  Microelectronics Research Center, SANYO Electric Co., Ltd.,

• Harada Mitsuaki

  Microelectronics Research Center Sanyo Electric Co. Ltd.

• Doi Atsumasa

  Microelectronics Research Center Sanyo Electric Co. Ltd.

• Ogasawara Satoru

  Microelectronics Research Center Sanyo Electric Co. Ltd.

• Yamada Isao

  Ion Beam Engineering Experimental Laboratory Kyoto University

• AKIZUKI Makoto

  Microelectronics Research Center, SANYO Electric Co., Ltd.

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著作論文

• Low-Temperature Oxidation of Silicon by O_2 Cluster Ion Beams
• A New Low-Temperature Oxidation Technique by Gas Cluster Ion Beams

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