Kim Sung-jun | Nano-soi Process Laboratory Hanyang University

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概要

• 同名の論文著者
• Nano-soi Process Laboratory Hanyang Universityの論文著者

関連著者

• Paik Ungyu

  Department Of Ceramic Engineering Hanyang University

• Kim Sung-jun

  Nano-soi Process Laboratory Hanyang University

• Park Jea-gun

  Nano-soi Process Laboratory Department Of Electrical And Computer Engineering Hanyang University

• Katoh Takeo

  Nano-soi Process Laboratory Hanyang University

• Kang Hyun-goo

  Nano-soi Process Laboratory Hanyang University

• Kim Sung-jun

  Department Of Ceramic Engineering Hanyang University

• Kim S‐j

  Department Of Ceramic Engineering Hanyang University

• Paik U

  Department Of Ceramic Engineering Hanyang University

• Kim S‐k

  Hanyang Univ. Seoul Kor

• Park J‐g

  Nano-soi Process Laboratory Hanyang University

• Park Jea-gun

  Nano-SOI Process Laboratory, Hanyang University

• Park Hyung-soon

  Hynix Semiconductor Inc.

• KATOH Takeo

  Nano-SOI Process Laboratory, Hanyang University

• Park Jea-gun

  Nano-soi Process Laboratory Hanyang University

• Park Jea-gun

  Advanced Semiconductor Material And Device Development Center Hanyang University

• Kim Sung-Jun

  Nano-SOI Process Laboratory, Hanyang University, 17 Haengdang-Dong, Seoungdong-Gu, Seoul 133-791, Korea

• Kang H‐g

  Nano-soi Process Laboratory Hanyang University

• Kang Hyun‐goo

  Hanyang Univ. Seoul Kor

• KANG Hyun-Goo

  Nano-SOI Process Laboratory, Hanyang University

• KIM Dae-Hyeong

  KCTech

• Paik Ungyu

  Department of Ceramic Engineering, Hanyang University, 17 Haengdang-Dong, Seoungdong-Gu, Seoul 133-791, Korea

• Park Jea-Gun

  Nano-SOI Process Laboratory, Hanyang University, 17 Haengdang-Dong, Seoungdong-Gu, Seoul 133-791, Korea

• Park Hyung-Soon

  Hynix Semiconductor Inc., San 136-1, Ami-ri, Bubal-eub, Icheon, Kyungki-do 467-701, Korea

• Kim Dae-Hyeong

  KCTech, 271-14 Kyeruk-Ri, Miyang-Myon, Anseong-Si, Kyongki-Do, Korea

• Katoh Takeo

  Nano-SOI Process Laboratory, Hanyang University, 17 Haengdang-Dong, Seoungdong-Gu, Seoul 133-791, Korea

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著作論文

• Effects of Grain Size and Abrasive Size of Polycrystalline Nano-particle Ceria Slurry on Shallow Trench Isolation Chemical Mechanical Polishing
• Effect of Slurry Surfactant on Nanotopography Impact in Chemical Mechanical Polishing
• Dependence of Non-Prestonian Behavior of Ceria Slurry with Anionic Surfactant on Abrasive Concentration and Size in Shallow Trench Isolation Chemical Mechanical Polishing
• Effects of Grain Size and Abrasive Size of Polycrystalline Nano-particle Ceria Slurry on Shallow Trench Isolation Chemical Mechanical Polishing

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