Strong Mid-Infrared Absorption and High Crystallinity of Microstructured Silicon Formed by Femtosecond Laser Irradiation in NF₃ Atmosphere
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概要
著者
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Li Ning
State Key Laboratory For Agrobiotechnology College Of Biological Science China Agricultural Universi
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Zhao Li
State Key Laboratory Of Bioreactor Engineering East China University Of Science And Technology
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Rong Ximing
Shanghai Ultra-Precision Optical Manufacturing Engineering Center, Department of Optical Science and Engineering, Fudan University, Shanghai 200433, China
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Shao Hezhu
Shanghai Ultra-Precision Optical Manufacturing Engineering Center, Department of Optical Science and Engineering, Fudan University, Shanghai 200433, China
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Liang Cong
State Key Laboratory of Surface Physics and Department of Physics, Fudan University, Shanghai 200433, China
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Zhu Zhen
Shanghai Ultra-Precision Optical Manufacturing Engineering Center, Department of Optical Science and Engineering, Fudan University, Shanghai 200433, China
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Dong Xiao
Shanghai Ultra-Precision Optical Manufacturing Engineering Center, Department of Optical Science and Engineering, Fudan University, Shanghai 200433, China
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Zhuang Jun
Shanghai Ultra-Precision Optical Manufacturing Engineering Center, Department of Optical Science and Engineering, Fudan University, Shanghai 200433, China
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Sun Haibin
State Key Laboratory of Surface Physics and Department of Physics, Fudan University, Shanghai 200433, China
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Feng Guojin
Spectrophotometry Laboratory, National Institute of Metrology, Beijing 100013, China
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