Strong Mid-Infrared Absorption and High Crystallinity of Microstructured Silicon Formed by Femtosecond Laser Irradiation in NF
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概要
- 論文の詳細を見る
Arrays of high-quality crystalline conical spikes were formed on silicon surface in the presence of NF<inf>3</inf>with femtosecond laser irradiation. The surface of the structures is smooth, and Raman scattering spectroscopy shows that few silicon polymorphs such as a-Si, Si-XII, and Si-III were observed in the conical structures. In the mid-infrared wavelength range of 3--16 μm, the structured surface exhibits a high absorptance up to 0.8. Additionally, the absorptance of the sample remains almost unchanged after the annealing process. These properties of the structured silicon will make it a promising material for mid-infrared applications in optoelectronic fields.
- 2013-08-25
著者
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Li Ning
State Key Laboratory For Agrobiotechnology College Of Biological Science China Agricultural Universi
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Zhao Li
State Key Laboratory Of Bioreactor Engineering East China University Of Science And Technology
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Rong Ximing
Shanghai Ultra-Precision Optical Manufacturing Engineering Center, Department of Optical Science and Engineering, Fudan University, Shanghai 200433, China
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Shao Hezhu
Shanghai Ultra-Precision Optical Manufacturing Engineering Center, Department of Optical Science and Engineering, Fudan University, Shanghai 200433, China
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Liang Cong
State Key Laboratory of Surface Physics and Department of Physics, Fudan University, Shanghai 200433, China
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Zhu Zhen
Shanghai Ultra-Precision Optical Manufacturing Engineering Center, Department of Optical Science and Engineering, Fudan University, Shanghai 200433, China
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Dong Xiao
Shanghai Ultra-Precision Optical Manufacturing Engineering Center, Department of Optical Science and Engineering, Fudan University, Shanghai 200433, China
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Zhuang Jun
Shanghai Ultra-Precision Optical Manufacturing Engineering Center, Department of Optical Science and Engineering, Fudan University, Shanghai 200433, China
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Sun Haibin
State Key Laboratory of Surface Physics and Department of Physics, Fudan University, Shanghai 200433, China
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Feng Guojin
Spectrophotometry Laboratory, National Institute of Metrology, Beijing 100013, China
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Li Ning
State Key Laboratory of Surface Physics and Department of Physics, Fudan University, Shanghai 200433, China
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