Effect of Target-Substrate Distance on the Properties of Hetero Facing Target Sputtered Al-Ga-Zn-O Films (Crystal growth, surfaces, interfaces, thin films, and bulk materials)
スポンサーリンク
概要
著者
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Kim Han-Ki
Department of Advanced Materials Engineering for Information and Electronics, Kyung Hee University, Yongin, Gyeonggi 446-701, Republic of Korea
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Seo Ki-Won
Department of Advanced Materials Engineering for Information and Electronics, Kyung Hee University, Yongin, Gyeonggi 446-701, Republic of Korea
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Shin Hyun-Su
Department of Advanced Materials Engineering for Information and Electronics, Kyung Hee University, Yongin, Gyeonggi 446-701, Republic of Korea
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Lee Ju-Hyun
Department of Advanced Materials Engineering for Information and Electronics, Kyung Hee University, Yongin, Gyeonggi 446-701, Republic of Korea
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- Effect of Target-Substrate Distance on the Properties of Hetero Facing Target Sputtered Al-Ga-Zn-O Films (Crystal growth, surfaces, interfaces, thin films, and bulk materials)