Chemical vapor deposition of nanocarbon on electroless NiB catalyst using ethanol precursor (Special issue: Advanced metallization for ULSI applications)
スポンサーリンク
概要
著者
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UENO Kazuyoshi
Shibaura Institute of Technology, Dept. of Electronic Engineering
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Tanaka Toru
Shibaura Institute of Technology, Koto, Tokyo 135-8548, Japan
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Sato Tomomi
Shibaura Institute of Technology, Koto, Tokyo 135-8548, Japan
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Karasawa Yusuke
Shibaura Institute of Technology, Koto, Tokyo 135-8548, Japan
関連論文
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