Improvement in etch rate uniformity using resistive electrodes with multistep cavity
スポンサーリンク
概要
- 論文の詳細を見る
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
著者
関連論文
- Compositional Dependence of Electrical Properties of Highly (100)-/(001)-Oriented Pb(Zr,Ti)O_3 Thick Films Prepared on Si Substrates by Metalorganic Chemical Vapor Deposition
- Structural and Electrical Properties of Polycrystalline Bi_Nd_xTi_3O_ Ferroelectric Thin Films with in-Plane c-Axis Orientations
- Charge-Compensative Ion Substitution of La^-Substituted Bismuth Titanate Thin Films for Enhancement of Remanent Polarization
- Electrical Properties of (Ca,Sr)Bi_4Ti_40_ Thin Films Fabricated Using a Chemical Solution Deposition Method
- Synthesis and Electrical Properties of Sr-and Nb-Cosubstituted Bi_Sr_xTi_NbO_ Polycrystalline Thin Films
- Fabrication of M^-Substituted and M^/V^-Cosubstituted Bismuth Titanate Thin Films [M = lanthanoid] by Chemical Solution Deposition Technique
- Ferroelectric Properties of Al-doped Lead Titanate Zirconate Thin Films Prepared by Chemical Solution Deposition Process
- Preparation of Sputter-deposited Fe-Pd Thin Films
- Effect of Pb_(Al_Nb_)O_3 on Structure and Electrical Properties of Lead Titanate Thin Films Prepared by Chemical Solution Deposition Process(Electrical Properties of Condensed Matter)
- Electrical and Physical Properties of Lead Aluminum Niobate-Lead Titanate Ferroelectric Thin Films Prepared by Chemical Solution Deposition Process : Electrical Properties of Condensed Matter
- Crystallization Process of TiNi Thin Films Sputtered at Elevated Temperatures on Pt/Si Oxide/Si and Si Oxide/Si Substrates
- Improvement in etch rate uniformity using resistive electrodes with multistep cavity
- Piezoelectric Properties of Polar-Axis-Oriented Ferroelectric Bi_Pr_xTi_3O_ Thick Films
- Ferroelectric and Piezoelectric Properties of Disk Shape Lead Zirconate Titanate Thick Films
- Orientation Behavior and Ferro- and Piezoelectric Properties of Bi_Pr_xTi_3O_ Polycrystalline Films
- Evaluation of Longitudinal Displacement for Lead Zirconate Titanate Films
- Investigation of Etch Rate Uniformity of 60 MHz Plasma Etching Equipment : Nuclear Science, Plasmas, and Electric Discharges