Complex Refractive Index, Specific Heat Capacity, and Thermal Conductivity for Crystalline Sb--Te Alloys and ZnS--SiO
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概要
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We have measured the temperature dependence of the complex refractive index, specific heat capacity, and thermal conductivity of crystalline Sb--Te alloys and ZnS--SiO<inf>2</inf>with various compositions by using a spectroscopic ellipsometer, differential scanning calorimeter, and nanosecond pulsed light heating thermoreflectance system. The temperature range was set from room temperature to several hundred degrees Celsius. The values of these properties are useful for calculating realistic temperatures in memory devices and for designing device structures.
- 2013-12-25
著者
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Taketoshi Naoyuki
National Inst. Of Advanced Industrial Sci. And Technol. Ibaraki Jpn
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Yagi Takashi
National Metrology Institute of Japan (AIST), Tsukuba Central 3, 1-1-1 Umezono, Tsukuba, Ibaraki 305-8563, Japan
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Kuwahara Masashi
Electronics and Photonics Research Institute, National Institute of Advanced Industrial Science and Technology, Tsukuba, Ibaraki 305-8562, Japan
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Taketoshi Naoyuki
National Metolorogy Institute of Japan, AIST, Tsukuba, Ibaraki 305-8563, Japan
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Suzuki Osamu
Electronics and Photonics Research Institute, National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Ibaraki 305-8565, Japan
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Kuwahara Masashi
Electronics and Photonics Research Institute, National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Ibaraki 305-8565, Japan
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Yagi Takashi
National Metolorogy Institute of Japan, AIST, Tsukuba, Ibaraki 305-8563, Japan
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