Texture Evolution and Grain Competition in NiGe Film on Ge(001)
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概要
- 論文の詳細を見る
To understand the agglomeration mechanism of NiGe films grown on Ge(001), texture structures of NiGe films are revealed by X-ray pole figure measurement. Two preferred epitaxial orientations of the NiGe grains are identified to be NiGe(4\bar{5}4) \parallel Ge(001) NiGe[\bar{1}01] \parallel Ge[110] and NiGe(130) \parallel Ge(001) NiGe[002] \parallel Ge[110]. The component of the first epitaxial alignment becomes dominating and the latter diminishing with increasing annealing temperature. The NiGe grains of the second epitaxial alignment are unstable and diminishing at high temperature due to the relatively higher interface/surface energy. The competition of grains with various epitaxial orientations has made a significant contribution to film agglomeration.
- 2013-07-25
著者
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Huang Wei
Department Of Biochemistry And Molecular Biology Beijing Normal University Beijing Key Laboratory
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Li Jun
Department Of Biochemistry Zhongshan School Of Medicine Sun Yat-sen University
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Wang Chen
Department Of Chemistry The State Key Laboratory Of Coordination Chemistry Nanjing University
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Li Cheng
Department Of Bionano Engineering Hanyang University
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Xue Chunlai
State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
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Huang Wei
Department of Physics, Semiconductor Photonics Research Center, Xiamen University, Xiamen, Fujian 361005, China
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Tang Mengrao
Department of Physics, Semiconductor Photonics Research Center, Xiamen University, Xiamen, Fujian 361005, China
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Chen Songyan
Department of Physics, Semiconductor Photonics Research Center, Xiamen University, Xiamen, Fujian 361005, China
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Lai Hongkai
Department of Physics, Semiconductor Photonics Research Center, Xiamen University, Xiamen, Fujian 361005, China
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Wang Chen
Department of Physics, Semiconductor Photonics Research Center, Xiamen University, Xiamen, Fujian 361005, China
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Li Cheng
Department of Physics, Semiconductor Photonics Research Center, Xiamen University, Xiamen, Fujian 361005, China
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HUANG Wei
Department of Aeronautics and Astronautics, National Cheng Kung University
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