Effects of Heating Time and Intermediate Heating on Sol--Gel-Processed ZrO2 Thin Films
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概要
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Nanoscale-thick high-k ZrO2 films were fabricated via sol--gel method and the effects of heating time and an intermediate heat treatment on the microstructure and dielectric properties were studied. One set of films was spin-coated with a thickness of {\sim}13 nm on Si substrates by two consecutive coating and drying sequences, followed by heating at 500 °C for 1, 5, or 10 h, while another sample was prepared by heating at 500 °C for 1 h after each drying step (intermediate heated sample). As the heating time was extended, the permittivity increased, but the leakage current property degraded. In contrast, both the permittivity and leakage current property were enhanced in the case of the intermediate heated sample. These improvements were likely due to the effective elimination of remnant organics and the development of a two-layer morphology consisting of lower amorphous and upper crystalline layers, the formation of which occurred via the minimization of surface and strain energies.
- 2012-09-25
著者
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Lee Seung
School Of Advanced Materials Engineering Chonbuk National University
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JOO Jinho
School of Advanced Materials Science & Engineering, Sungkyunkwan University
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Kim Hyoungsub
School Of Advanced Materials Science And Engineering Sungkyunkwan University
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Park Kyung
School Of Advanced Materials Science And Engineering Sungkyunkwan University
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Lim Jun
School of Advanced Materials Science and Engineering, Sungkyunkwan University, Suwon, Gyeonggi 440-746, Korea
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Choi Jun
School of Advanced Materials Science and Engineering, Sungkyunkwan University, Suwon, Gyeonggi 440-746, Korea
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Park Kyung
School of Advanced Materials Science and Engineering, Sungkyunkwan University, Suwon, Gyeonggi 440-746, Korea
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Hwang Soo
School of Advanced Materials Science and Engineering, Sungkyunkwan University, Suwon, Gyeonggi 440-746, Korea
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Kim Hyoungsub
School of Advanced Materials Science and Engineering, Sungkyunkwan University, Suwon, Gyeonggi 440-746, Korea
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