Growth of IrOx--SnOx Films Deposited by Reactive Sputtering
スポンサーリンク
概要
- 論文の詳細を見る
IrOx--SnOx thin films were deposited on a glass substrate by reactive sputtering using two types of SnO2 and Ir targets between room temperature (RT) and 200 °C. The X-ray diffraction pattern indicates crystallization at 100 °C, and identifies IrOx--SnOx thin films as tetragonal rutile type structures. The IrOx--SnOx thin films also exhibit low average transmittance and resistivity at 100 °C.
- 2011-05-25
著者
-
Yoshino Kenji
Department Of Anatomy Nihon University School Of Dentistry At Matsudo
-
Yoshino Kenji
Department of Electrical and Electronic Engineering, University of Miyazaki, Miyazaki 889-2192, Japan
-
Kawano Yoshihiko
Essential Technology Department, Honda Lock Mfg. Co., Ltd., Miyazaki 880-0923, Japan
-
Harada Shun
Department of Electrical and Electronic Engineering, University of Miyazaki, Miyazaki 889-2192, Japan
-
Fukudome Syuji
Essential Technology Department, Honda Lock Mfg. Co., Ltd., Miyazaki 880-0923, Japan
-
Sei Fumihiro
Essential Technology Department, Honda Lock Mfg. Co., Ltd., Miyazaki 880-0923, Japan
関連論文
- IgE Responses in Mice Fed Moderate Protein Deficient and High Protein Diets
- Low-Protein Diet Induces Oral Tolerance to Ovalbumin in Mice
- Effects of pH Variation and NaCl on In Vitro Digestibility of Cow's Milk Proteins in Commercially Available Infant Formulas
- Sexual difference in shell use in the hermit crab Pagurus filholi (de Man) from northern Japan
- Non-Radiative Carrier Recombination Process in AlGaAs/GaAs Hetero-Structure investigated by Piezoelectric Photothermal Spectroscopy
- The Interaction between Shell Size and Shell Species Preferences of the Hermit Crab Pagurus filholi
- Piezoelectric Photoacoustic and Photoluminescence Properties of CuIn_XGa_Se_2 Alloys
- Low-Temperature Growth of ZnO Films by Spray Pyrolysis
- Appendico-ileo-vesical fistula
- Morphological Study of the Dentino-enamel Junction of the Upper First Deciduous Molar
- Low Sheet Resistivity of Transparent Ga-Doped ZnO Film Grown by Atmospheric Spray Pyrolysis
- Nonradiative Investigation of Hole Photoionization Spectrum of EL2 in Carbon Concentration Controlled Semi-Insulating GaAs
- Impurity Levels of Alkaline Metals in Zincselenide Single Crystals Examined by Photoluminescence
- Crystallization of Amorphous GeSe_2 Semiconductor by Isothermal Annealing without Light Radiation
- Functional Roles of Gastropod Shells in the Hermit Crab Pagurus filholi : Effects of Shell Size and Species on Fitness
- IgE Responses in Mice Fed Moderate Protein Deficient and High Protein Diets
- Growth of Cu(In,Ga)Se_2 Films Selenized Using Dimethylselenium
- Morphological Study of the Dentino-enamel Junction of the Upper First Deciduous Molar
- Effect of H2S Annealing on Sb-Doped Cu--In--S Thin Films Prepared by Vacuum Evaporation
- Growth of Spin-Coated ZnO Films Using Diethylzinc Solution
- Growth of IrOx--SnOx Films Deposited by Reactive Sputtering
- Growth of Cu2ZnSnS4 Single Crystal by Traveling Heater Method
- Photoacoustic Spectra for Porous Silicon Using Piezoelectric Transducer and Microphone
- Growth and Annealing of ZnO Films Grown by Spray Pyrolysis
- Photoluminescence of Zincselenide Single Crystals Grown by the Sublimation Method
- A study of the interactions between free radicals and cobalt complexes.
- Effect of H2S Annealing on Ag-Rich Ag--In--S Thin Films Prepared by Vacuum Evaporation