High-Extinction Ratio and Low-Driving-Voltage Spatial Light Modulator by Use of Ultrahigh-Purity GaAs
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概要
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Highly efficient surface normal spatial light modulators (SLMs) using ultrahigh-purity GaAs layers (30 μm thick) grown on (100)-oriented n+-GaAs substrate by liquid phase epitaxy (LPE) method have been realized. Clear exciton absorption has been observed even at room temperature. The extinction ratio of 25 dB has been demonstrated with a low-driving voltage (32 V) at 895 nm, based on electroabsorption (EA) effect. Very large depletion length over 150 μm is confirmed by analyzing the extinction ratio and capacitance–voltage ($C$–$V$) measurements. The calculated value of impurity concentration is very low (${\approx}10^{12}$ cm-3), which indicates that the concentration of donor and acceptor in the device are highly compensated.
- 2010-10-25
著者
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Takahashi Makoto
Department Of Applied Chemistry College Of Engineering Chubu University
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Wakita Koichi
Department of Electrical and Electronics Engineering, Chubu University, Kasugai, Aichi 487-8501, Japan
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Kayastha Madhu
Department of Electrical and Electronics Engineering, Chubu University, Kasugai, Aichi 487-8501, Japan
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