Real-Time Observation of Film Structure Using X-ray Waveguide Phenomenon
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概要
- 論文の詳細を見る
The X-ray waveguide phenomenon was applied for quick evaluation of film structure. By irradiating synchrotron radiation white X-rays on a Si/ poly(methyl methacrylate) (PMMA)/Si multilayer, we observed the spectrum of the guided X-rays, which provides information on the thickness and density of the film, and followed its variation over time due to radiation damage induced by the strong white X-ray beam. The rapid PMMA layer compression, which occurring during the first 200 s after the irradiation, was sensitively monitored by the present method.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2009-11-25
著者
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TAKENAKA Hisataka
NTT-Advanced Technology
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ITO Masahisa
Graduate School of Engineering, Gunma University
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HAYASHI Kouichi
Institute for Materials Research, Tohoku University
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Suzuki Kosuke
Graduate School Of Engineering Gunma University
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Nakamura Takahiro
Institute Of Multidisciplinary Research For Advanced Materials Tohoku University
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Hu Wen
Institute of Materials Research, Tohoku University, Sendai 980-8577, Japan
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