High-Transmittance Free-Standing Aluminum Extreme Ultraviolet Filter

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概要

• 論文の詳細を見る

• We have designed and fabricated a high-transmittance, extremely flat, free-standing extreme ultraviolet (EUV) filter for the wavelength region between 17–50 nm. The Al thin-film filter, which is coated with a SiC film to increase its oxidation tolerance, has a transmittance of 29% at 30 nm. This value is approximately 5 times higher than that of an uncoated filter fabricated using a conventional method.

• 2009-12-25

著者

• GULLIKSON Eric

  Lawrence Berkeley Laboratory

• TAKENAKA Hisataka

  NTT-Advanced Technology

• Suda Akira

  Riken (the Institute Of Physical And Chemical Research)

• Midorikawa Katsumi

  Graduate School of Science and Engineering, Saitama University, Sakura, Saitama 338-8570, Japan

• Gullikson Eric

  Lawrence Berkley National Laboratory, Berkeley, CA 94720, U.S.A.

• Hatayama Masatoshi

  Graduate School of Science and Engineering, Saitama University, Sakura, Saitama 338-8570, Japan

• Suda Akira

  RIKEN Advanced Science Institute, 2-1 Hirosawa, Wako, Saitama 351-0198, Japan

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