KrF Excimer Laser Ablation of Al2O3 and Al2O3–TiC Ceramics

概要

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Al2O3–TiC ceramics were processed with KrF excimer laser radiation (248 nm). The surface topography of the ablated Al2O3–TiC exhibits many conelike structures with a diameter of 10 μm and a column height of 30 μm. The surface roughness of Al2O3 at the base end surface is smooth, but the surface projection appears at the lateral face. The maximum height of irregularities ($R_{\text{max}}$) of Al2O3–TiC is smaller than that of Al2O3 in the case of 0 to 50 pulses are used. However, the $R_{\text{max}}$ of Al2O3–TiC is higher than that of Al2O3 when over 50 pulses. Energy-dispersive X-ray spectroscopy (EDX) measurement reveals that the ablated conelike surface is composed of a material with high titanium content. EDX results show that the content of Al2O3 in Al2O3–TiC decreases markedly with an increase in fluence.
Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
2008-02-25