Advanced Ceramics Synthesized by Inductively Coupled Plasma with Inner RF Antenna
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概要
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A chemical vapor deposition (CVD) system based on 27.12-MHz-RF-heated plasma discharge was developed to investigate the synthesis of advanced ceramics, particularly diamond. In our unique system, a four-turn RF antenna coil was installed inside the chamber. Here, we found for the first time an interesting physical behavior in which capacitively coupled plasma (CCP) suddenly changed to inductively coupled plasma (ICP) at the threshold power. The plasma characteristics, which were measured using a double prove, exhibited $T_{\text{e}} \sim 10$ eV and $n_{\text{e}} \sim 10^{11}$ cm-3. No impurity was observed, judging from the spectroscopic measurement results. Ball-like diamond on a silicon (Si) substrate was synthesized by the low-power RF heating.
- 2008-01-25
著者
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Kanno Yoshinori
Interdisciplinary Graduate School Of Medicine And Engineering University Of Yamanashi
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Nakagaki Keita
Interdisciplinary Graduate School of Medicine and Engineering, University of Yamanashi, 4-3-11 Takeda, Kofu 400-8511, Japan
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Yamauchi Toshihiko
Quantum Beam Science Directorate, Japan Atomic Energy Agency, 2-4 Shirakata Shirane, Tokai, Ibaraki 319-1195, Japan
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Kobayashi Seiji
Quantum Beam Science Directorate, Japan Atomic Energy Agency, 2-4 Shirakata Shirane, Tokai, Ibaraki 319-1195, Japan
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