Volatile Organic Compound Gas Sensing Using Quartz Crystal Microbalance with Inorganic Films Coated by Pulsed Laser Deposition
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概要
- 論文の詳細を見る
We fabricated a quartz crystal microbalance (QCM) coated with inorganic films for volatile organic compound (VOC) gas sensing. The deposited materials were SiO2, TiO2, and Al2O3. Inorganic films were formed on a quartz electrode by pulsed laser deposition (PLD) and/or a sol–gel method. The TiO2 film had the highest sensitivity due to its large surface area. VOC gases were dichloromethane, carbon tetrachloride and toluene. Toluene showed the largest amount of adsorption onto the inorganic films. Sol–gel-coated TiO2 had about quintuple sensitivity, compared with PLD-coated TiO2.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2008-01-25
著者
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Kanno Yoshinori
Interdisciplinary Graduate School Of Medicine And Engineering University Of Yamanashi
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Sugimoto Hiroshi
Sensing Laboratory Co., Ltd., 36-13 Honcho, Hachioji, Tokyo 192-0066, Japan
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Tanaka Hirokazu
Sensing Laboratory Co., Ltd., 36-13 Honcho, Hachioji, Tokyo 192-0066, Japan
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