Improvement of Crystal Quality of n-AlGaN by Alternate-Source-Feeding Metal Organic Vapor Phase Epitaxy
スポンサーリンク
概要
- 論文の詳細を見る
The crystal quality of AlGaN layers was improved using alternate-source-feeding epitaxy (ASFE) in low-pressure (LP) metal organic vapor phase epitaxy (MOVPE). The green emission of photoluminescence (PL) from the AlGaN clad layer was reduced, indicating that point defects such as Ga or Al vacancy were reduced by ASFE. On the other hand, the full width at half maximum (FWHM) of the X-ray rocking curve was not improved at all and the dislocation density observed by transmission electron microscopy (TEM) was not reduced by ASFE. Furthermore, the yellow emission from GaN/AlGaN multi-quantum well (MQW) grown by conventional-simultaneous source-feeding epitaxy (SSFE) on the ASFE AlGaN clad layer was also reduced. This indicates that the improvement of the crystal quality of the AlGaN clad layer influences the crystal quality of the MQW grown on it.
- 2007-09-15
著者
-
Hasegawa Fumio
Department Of Technology Meiji University
-
Kawanishi Hideo
Department Of Cardiology Himeji Cardiovascular Center
-
Niikura Eiichiro
Department of Electronic Engineering, Kogakuin University, Hachioji, Tokyo 192-0015, Japan
-
Isono Ken-ichi
Department of Electronic Engineering, Kogakuin University, Hachioji, Tokyo 192-0015, Japan
-
Murakawa Koichi
Department of Electronic Engineering, Kogakuin University, Hachioji, Tokyo 192-0015, Japan
-
Kawanishi Hideo
Department of Electronic Engineering, Kogakuin University, Hachioji, Tokyo 192-0015, Japan
-
Hasegawa Fumio
Department of Electronic Engineering, Kogakuin University, Hachioji, Tokyo 192-0015, Japan
-
Hasegawa Fumio
Department of Electronic Engineering, Kogakuin University, 2665-1 Nakanno-machi, Hachioji, Tokyo 192-0015, Japan
関連論文
- Arrhythmia in Young Patients with Mitral Valve Prolapse : THE 8TH CONFERENCE ON PRVENTION FOR RHEUMATIC FEVER AND RHEUMATIC HEART DISEASE
- A Long-term Follow-up Study of Acute Myocarditis an Electrocardiographic and Echocardiographic Study : THE 8TH CONFERENCE ON PRVENTION FOR RHEUMATIC FEVER AND RHEUMATIC HEART DISEASE
- A Long-term Follow-up Study of Acute Viral and Idiopathic Myocarditis : THE 7th CONFERENCE ON PREVENTION FOR RHEUMATIC FEVER AND RHEUMATIC HEART DISEASE
- VENTRICULAR ARRHYTHMIA AND SUDDEN DEATH IN HYPERTROPHIC CARDIOMYOPATHY : Cardiomyopathy (II) : 46th Annual Scientific Meeting, Japanese Circulation Society
- Ga_xIn_As_yP_-InP Injection Laser Partially Loaded with Distributed Bragg Reflector
- Monolithic Integration of Laser and Amplifier/Detector by Twin-Guide Structure
- Band-Gap Energy and Effecive Mass of BGaN
- Dependence of Crystal Quality on Residual Strain in Strain-Controlled Thin AlN Layer Grown by Metalorganic Vapor Phase Epitaxy
- Tensile Strain Introduced in AlN Layer Grown by Metal-Organic Vapor-Phase Epitaxy on (0001) 6H-SiC with (GaN/AlN) Buffer
- Measurement of Effective Refractive Index of GaInAsP Grown on (100) GaAs by LPE
- Ga_xIn_As_yP_/Ga_x'In_1-x'>As_y'P_<1-y'> DH Visible Injection Lasers Lattice Matched with (100) GaAs
- 25) STUDY ON SUDDEN DEATH AND VENTRICULAR TACHYARRHYTHMIAS BY HOLTER MONITORING IN DILATED CARDIOMYOPATHY
- 24) STUDY ON SUDDEN DEATH AND VENTRICULAR TACHYARRHYTHMIA BY HOLTER MONITORING IN HCM
- 4) STUDIES ON PATIENTS WITH HYPERTENSION OBSERVED IN THE FAMILY OF IDIOPATHIC HYPERTROPHIC CARDIOMYOPATHY
- Violet and Near-UV Light Emission from GaN/Al_Ga_N Injection Diode Grown on (0001) 6H-SiC Substrate by Low-Pressure Metal-Organic Vapor Phase Epitaxy
- Fine Epitaxial Growth of Monolayer-Stepped GaInAs/InP Quantum Wells by Metalorganic Molecular Beam Epitaxy
- Temperature Characteristics of a GaAs-AlGaAs Integerated Twin Guide Laser with Distributed Bragg Reflectors
- GaInAsP/InP Integrated Twin-Guide Lasers with First-Order Distributed Bragg Reflectors at 1.3 μm Wavelength
- Improvement of Crystal Quality of AlGaN Multi Quantum Well Structure by Combination of Flow-Rate Modulation Epitaxy and AlN/GaN Multi-Buffer Layer and Resultant Lasing at Deep Ultra-Violet Region
- Asymptotic Behavior of the Correlation Function of a Randomly Modulated Oscillator
- Improvement of Crystal Quality of n-AlGaN by Alternate-Source-Feeding Metal Organic Vapor Phase Epitaxy
- Reduction of Threading Dislocations in AlGaN/AlN/SiC Epitaxial Layers by Controlled Strain with (AlN/GaN) Multibuffer-Layer Structure
- Relationship between Excess Ga and Residual Oxides in Amorphous GaN Films Deposited by Compound Source Molecular Beam Epitaxy