Athermal and Polarization-Independent Microring Resonator Filter Using Stress Control
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概要
- 論文の詳細を見る
The temperature and polarization dependences of the resonant wavelength of a vertically coupled microring resonator filter were controlled using the photoelastic effect induced by the internal stress in the dielectric core layer. The internal stress was controlled by etching back the core layer after sputtering deposition and by thermal annealing. The temperature dependence of the resonant wavelength of the microring resonator filter was successfully reduced to one-tenth that of conventional silica-based waveguide filters and the resonant wavelength change was suppressed within $\pm 0.05$ nm in the temperature range of 33–90 °C. This athermal filter was realized for transverse electric (TE) polarization, and the temperature dependence of transverse magnetic (TM) polarization was negative and its absolute value was 0.016 nm/°C. Utilizing this polarization dependence of the temperature coefficient, the polarization dependence of the resonant wavelength of the microring resonator filter was eliminated by temperature control.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2007-08-30
著者
-
Kokubun Yasuo
Department Of Electrical And Computer Engineering Faculty Of Engineering Yokohama National Universit
-
Zaizen Nobuhiro
Department of Electrical and Computer Engineering, Graduate School of Engineering, Yokohama National University, Yokohama 240-8501, Japan
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Kobayashi Naoki
Department of Applied Chemistry, Faculty of Engineering, Osaka University
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