Determination of Effective Nanoindentation Range for Hard (Ti,Al)N Thin Film
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概要
- 論文の詳細を見る
In this study, a theoretical approach to determine effective nanoindentation range was conducted. The tip radius was first calculated from the experimental contact area function. Then a minimal indentation depth, at which the tip rounding effect can be negligible, was determined. As a representative system for the hard film on the soft substrate, the (Ti,Al)N film on the Si substrate was selected. The yield strengths were estimated for the evaluation of the substrate effect. The minimal indentation depth, at which the substrate effect can be negligible, was determined using the yield strength and tip radius. Finally, the effective nanoindentation range was estimated for the sample. The elastic modulus and the hardness of the film were also numerically verified.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2006-08-15
著者
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Jeong Seong-min
Department Of Ceramic Engineering Yonsei University
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Lee Hong-lim
Department Of Ceramic Engineering School Of Material Science And Engineering College Of Engineering
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Mai Yiu-wing
Centre For Advanced Materials Technology Department Of Mechanical & Mechatronic Engineering J07
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Li Kwok-Yan
Department of Manufacturing Engineering and Engineering Management (MEEM), City University of Hong Kong, Tat Chee Avenue, Kowloon, Hong Kong
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Jeong Seong-Min
Department of Ceramic Engineering, Yonsei University, 134 Shinchon-dong, Seodaemun-gu, Seoul, 120-749, Korea
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Shen Yao-Gen
Department of Manufacturing Engineering and Engineering Management (MEEM), City University of Hong Kong, Tat Chee Avenue, Kowloon, Hong Kong
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Shum Po-Wan
Department of Manufacturing Engineering and Engineering Management (MEEM), City University of Hong Kong, Tat Chee Avenue, Kowloon, Hong Kong
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Lee Hong-Lim
Department of Ceramic Engineering, Yonsei University, 134 Shinchon-dong, Seodaemun-gu, Seoul, 120-749, Korea
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Mai Yiu-Wing
Centre for Advanced Materials Technology (CAMT), School of Aerospace, Mechanical and Mechatronic Engineering, Mechanical Building J07, The University of Sydney, Sydney, NSW 2006, Australia
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