Local Oxidation of Titanium Using Dynamic-Mode Tuning-Fork Probe with Microfabricated Silicon Cantilever
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概要
- 論文の詳細を見る
We present a unique probe that is based on a quartz tuning fork and a microfabricated cantilever. The probe is self-actuating and self-sensing. The cantilever can be tailored to the needs of specific applications, in this case to feature an electrically connected tip, in order to apply a potential to it. We investigate the usability of our probe with a tip for local oxidation experiments. We performed cyclic voltammetry to determine the bias voltage beyond which local anodic oxidation can happen. Our goal is to use this probe in a future scanning probe microscopy (SPM) lithography apparatus.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2006-03-15
著者
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De Rooij
Institute Of Microtechnology University Of Neuchatel
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Staufer Urs
Institute Of Microtechnology University Of Neuchatel
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Akiyama Terunobu
Institute Of Microtechnology University Of Neuchatel
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Suter Kaspar
Institute of Microtechnology, University of Neuchâtel, Jaquet-Droz 1, 2007 Neuchâtel, Switzerland
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Suter Kaspar
Institute of Microtechnology, University of Neuchâtel, Jaquet-Droz 1, 2002 Neuchâtel, Switzerland
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Akiyama Terunobu
Institute of Microtechnology, University of Neuchâtel, Jaquet-Droz 1, 2007 Neuchâtel, Switzerland
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de Rooij
Institute of Microtechnology, University of Neuchâtel, Jaquet-Droz 1, 2007 Neuchâtel, Switzerland
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- Local Oxidation of Titanium Using Dynamic-Mode Tuning-Fork Probe with Microfabricated Silicon Cantilever
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