Scanning Probe with Tuning Fork Sensor, Microfabricated Silicon Cantilever and Conductive Tip for Microscopy at Cryogenic Temperature
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概要
- 論文の詳細を見る
A quartz tuning-fork (TF)-based scanning probe is presented for local electrical transport measurements on quantum devices below the liquid 4He temperature. The TF is utilized to drive and sense the mechanical oscillation of an attached, microfabricated cantilever featuring a conductive tip made of platinum silicide. The microfabricated structure allows the application of an external voltage to the tip, while the cantilever is electrically grounded. The probe was characterized at room temperature, 70 K, and 2 K. It was found that spatial sensitivity decreased with temperature. Imaging a gold surface at 2 K was successfully performed. A number of probes can be batch-fabricated, thus shortening the lead time for conducting experiments in cryogenic scanning force microscopy.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2006-03-15
著者
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De Rooij
Institute Of Microtechnology University Of Neuchatel
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Staufer Urs
Institute Of Microtechnology University Of Neuchatel
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Akiyama Terunobu
Institute Of Microtechnology University Of Neuchatel
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Suter Kaspar
Institute of Microtechnology, University of Neuchâtel, Jaquet-Droz 1, 2002 Neuchâtel, Switzerland
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Staufer Urs
Institute of Microtechnology, University of Neuchâtel, Jaquet-Droz 1, 2002 Neuchâtel, Switzerland
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Baumgartner Andreas
Nano-Physics Group, Laboratory of Solid State Physics, ETH Hönggerberg, 8093 Zürich, Switzerland
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Gildemeister Arnd
Nano-Physics Group, Laboratory of Solid State Physics, ETH Hönggerberg, 8093 Zürich, Switzerland
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Ihn Thomas
Nano-Physics Group, Laboratory of Solid State Physics, ETH Hönggerberg, 8093 Zürich, Switzerland
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Ensslin Klaus
Nano-Physics Group, Laboratory of Solid State Physics, ETH Hönggerberg, 8093 Zürich, Switzerland
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Ensslin Klaus
Nano-Physics Group, Laboratory of Solid State Physics, ETH Hönggerberg, 8093 Zürich, Switzerland
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Gildemeister Arnd
Nano-Physics Group, Laboratory of Solid State Physics, ETH Hönggerberg, 8093 Zürich, Switzerland
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Baumgartner Andreas
Nano-Physics Group, Laboratory of Solid State Physics, ETH Hönggerberg, 8093 Zürich, Switzerland
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Ihn Thomas
Nano-Physics Group, Laboratory of Solid State Physics, ETH Hönggerberg, 8093 Zürich, Switzerland
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de Rooij
Institute of Microtechnology, University of Neuchâtel, Jaquet-Droz 1, 2002 Neuchâtel, Switzerland
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Akiyama Terunobu
Institute of Microtechnology, University of Neuchâtel, Jaquet-Droz 1, 2002 Neuchâtel, Switzerland
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