Microfabricated Electrical Connector for Atomic Force Microscopy Probes with Integrated Sensor/Actuator
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 2002-06-30
著者
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AKIYAMA Terunobu
Institute of Microtechnology, University of Neuchatel
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STAUFER Urs
Institute of Microtechnology, University of Neuchatel
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Rooij Nico
Institute Of Microtechnology University Of Neuchatel
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Staufer Urs
Institute Of Microtechnology University Of Neuchatel
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Akiyama T
Institute Of Microtechnology University Of Neuchatel
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Akiyama Terunobu
Institute Of Microtechnology University Of Neuchatel
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