Scanning Capacitance Microscopy Evaluation of Lead Zirconate Titanate Film Formed by Aerosol Deposition Method

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概要

• 論文の詳細を見る

• The local electric properties of lead zirconate titanate (PZT) film prepared by the aerosol deposition method (ADM) were investigated by scanning capacitance microscopy (SCM) using a self-sensing probe. Although an obvious ferroelectric response cannot be observed from macroscopic polarization versus applied electric field ($P$–$E$) measurements for the as-deposited PZT film, capacitance images showed a distinctive contrast as the result of the spatial variation of local dielectric permittivity. The scanning capacitance spectroscopy (SCS) measurements show that there are localized regions which have poor ferroelectricity, and this is the cause of the nominal ferroelectric properties of as-deposited PZT film.

• Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
• 2006-03-30

著者

• Ogiso Hisato

  Advanced Process Technology Group Institute Of Mechanical Engineering National Institute Of Advanced

• Naitou Yuichi

  Nanoelectronics Research Institute, National Institute of Advanced Industrial Science and Technology, 1-1-1 Umezono, Tsukuba, Ibaraki 305-8568, Japan

• Naitou Yuichi

  Nanoelectronics Research Institute (NeRI), National Institute of Advanced Industrial Science and Technology (AIST), 1-1-1 Umezono, Tsukuba, Ibaraki 305-8568, Japan

• Ogiso Hisato

  Advanced Manufacturing Research Institute, National Institute of Advanced Industrial Science and Technology (AIST), 1-2-1 Namiki, Tsukuba, Ibaraki 305-8564, Japan

• Ogiso Hisato

  Advanced Manufacturing Research Institute, National Institute of Advanced Industrial Science and Technology, 1-2-1 Namiki, Tsukuba, Ibaraki 305-8564, Japan

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• Scanning Capacitance Microscopy Evaluation of Lead Zirconate Titanate Film Formed by Aerosol Deposition Method

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