Application of the Ag-Based Ohmic Contact to the Realization of Thermally-Stable InAlAs/InGaAs/InP High Electron Mobility Transistors
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概要
- 論文の詳細を見る
Auger electron spectroscopy analysis of Ag-based Ge/Ag/Ni ohmic contacts on InAlAs/InGaAs/InP revealed that the in-diffusion of the Ag down to the semiconductor layers was necessary for the formation of excellent ohmic contact. Atomic force microscopy characterization of the surface morphology showed that the root mean square roughness of the ohmic contact after annealing was as small as 3.0 nm. High electron mobility transistors with a gate length of 0.2 μm fabricated utilizing Ag-based ohmic contact showed excellent DC and RF characteristics including: $g_{\text{m,max}}$ of 835 mS/mm, $I_{\text{D,max}}$ of 813 mA/mm, $ f_{\text{T}}$ of 156 GHz, and $ f_{\text{max}}$ of 245 GHz. Due to the stable property of the Ag-based source and drain ohmic contacts, these devices were shown to be thermally stable through preliminary thermal storage tests at 215 °C.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2006-10-15
著者
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Adesida Ilesanmi
Micro And Nanotechnology Laboratory
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MOHAMMED Fitih
Micro and Nanotechnology Laboratory
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Zhao Weifeng
Micro and Nanotechnology Laboratory and Department of Electrical and Computer Engineering, University of Illinois at Urbana Champaign, 208 N. Wright St., Urbana, IL 61801, U.S.A.
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Zhao Weifeng
Micro and Nanotechnology Laboratory, Department of Electrical and Computer Engineering and Department of Materials Science and Engineering, University of Illinois at Urbana-Champaign, Urbana, IL 61801, U.S.A.
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Mohammed Fitih
Micro and Nanotechnology Laboratory, Department of Electrical and Computer Engineering and Department of Materials Science and Engineering, University of Illinois at Urbana-Champaign, Urbana, IL 61801, U.S.A.
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Adesida Ilesanmi
Micro and Nanotechnology Laboratory, Department of Electrical and Computer Engineering and Department of Materials Science and Engineering, University of Illinois at Urbana-Champaign, Urbana, IL 61801, U.S.A.
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