Unbalanced Magnetron Sputtering Using Cylindrical Target for Low-Temperature Optical Coating

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概要

• 論文の詳細を見る

• A new optical coating technology was developed for the first time using unbalanced magnetron sputtering combined with a cylindrical target. A significant reduction of ignition and glow discharge voltages were observed by adding magnets to carry out the unbalanced magnetron sputtering. A high deposition rate of 30 nm/min was realized for TiO2 film preparation; this rate was approximately 3 times larger than that obtained by conventional magnetron sputtering. Moreover, deposition power efficiency twice as large as that obtained by conventional magnetron sputtering was realized. A fine-grain structure was observed and a large refraction index of 2.65 was obtained.

• Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
• 2005-01-15

著者

• Sasaki Kimihiro

  Graduate School Of Natural Sci. & Technol. Kanazawa Univ.

• Hata Tomonobu

  Graduate School Of Natural Science And Technology Kanazawa University

• Yonezawa Yasuto

  Electricity/information Science Industrial Research Institute Of Ishikawa

• Wang Cheng-Shih

  Graduate School of Natural Science & Technology Kanazawa University, 2-40-20 Kodatsuno, Kanazawa 920-8667, Japan

• Yonezawa Yasuto

  Electricity/Information Science Industrial Research Institute of Ishikawa, 2-1 Kuratsugi, Kanazawa 920-8203, Japan

• Hata Tomonobu

  Graduate School of Natural Science & Technology Kanazawa University, 2-40-20 Kodatsuno, Kanazawa 920-8667, Japan

• Sasaki Kimihiro

  Graduate School of Natural Science & Technology Kanazawa University, 2-40-20 Kodatsuno, Kanazawa 920-8667, Japan

関連論文

• Room Temperature Thermoelectric Properties of Epitaxially Grown Si-Ge Thin Films on SOI Substrates
• Structural Properties of Heavily B-Doped SiGe Thin Films for High Thermoelectric Power
• Anomalous Large Thermoelectric PoWer on Heavily B-Doped SiGe Thin Films with Thermal Annealing : Structure and Mechanical and Thermal Properties of Condensed Matter
• Investigation of Thermoelectric Properties of Si/Ge Multilayer with Ultra-Heavily B Doping
• Improved Dielectric Properties of Tetragonal ZrO2 Gate Dielectric Fabricated by Ozone-Assisted Sputtering
• Crystallinity and Thermoelectric Properties of Si/GeB Multilayers Prepared with Si Buffer Layer and SiO2 Substrates
• Unbalanced Magnetron Sputtering Using Cylindrical Target for Low-Temperature Optical Coating

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