Effect of Fe–Si Mixed Powder on $\beta$-FeSi2 Formation from Fe–Si Mixture Film by Isothermal Process in Encapsulated Space
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概要
- 論文の詳細を見る
The isothermal process in evacuated and sealed ampoule at 930°C for 20 h for synthesizing $\beta$-FeSi2 was investigated using sputtered Fe–Si mixture film and Fe–Si mixed powder. It was found that the silicidation of the Fe–Si mixture film to $\beta$-FeSi2 was activated by Si vapor, accompanied with Fe vapor, generated and transported from the mixed powder. By this isothermal process with appropriate condition for Fe–Si mixture film preparation, a uniform and continuous single-phase $\beta$-FeSi2 film was synthesized.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2004-10-15
著者
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Oikawa Yasushi
Department Of Electrical Electronics And Computer Engineering Waseda University
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Ozaki Hajime
Department Of Electrical Electronics And Computer Engineering Waseda University
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Kim Changman
Department Of Electrical Electronics And Computer Engineering Waseda University
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Ozaki Hajime
Department of Electrical Engineering and Bioscience, Waseda University, Oukubo 3-4-1, Shinjuku-ku, Tokyo 169-8555, Japan
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Oikawa Yasushi
Department of Electrical Engineering and Bioscience, Waseda University, Oukubo 3-4-1, Shinjuku-ku, Tokyo 169-8555, Japan
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