Cantilever Type Lead Zirconate Titanate Microactuator Utilizing Ruthenium Oxide

概要

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A new and simple cantilever type Pb(Zr, Ti)O3 [PZT] microactuator was fabricated by adopting RuO2. The RuO2 has reasonably good conductivity and stiffness and it can replace the double layer of electrode and supporting layer to a single layer in a cantilever beam. The RuO2, PZT and Al thin films were deposited on the Si substrate. The patterning of the Al was carried out by a lithography process and etched with a chemical wet etchant. The etching of PZT and RuO2 were performed by a reactive ion etching system. The Si was etched isotropically to form a cantilever beam. The fabricated cantilever beam consists of Al, PZT and RuO2, and the thicknesses of the films are 0.40, 0.25 and 0.70 $\mu$m, respectively. The beams were from 140 $\mu$m to 275 $\mu$m in length and all of them were 60 $\mu$m wide. Driving tilt angles of the cantilever beams were almost proportional to the applied voltages.
INSTITUTE OF PURE AND APPLIED PHYSICSの論文
2000-05-15