Cantilever Type Lead Zirconate Titanate Microactuator Utilizing Ruthenium Oxide
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 2000-05-15
著者
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Choi Duck-kyun
Department Of Ceramic Engineering Hanyang University
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Hong Kyung-il
Department Of Ceramic Engineering Hanyang University
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Jeon Min-seok
Department Of Inorganic Materials Engineering Hanyang University
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Rim Chang-kyung
Division Of Materials Science And Metallurgical Engineering Hanyang University
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LEE Sun-Ho
Department of Inorganic Materials Engineering, Hanyang University
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HONG Kyung-II
Department of Inorganic Materials Engineering, Hanyang University
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LEE Jim-Won
Department of Inorganic Materials Engineering, Hanyang University
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Lee Sun-ho
Department Of Inorganic Materials Engineering Hanyang University
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Lee Jim-won
Department Of Inorganic Materials Engineering Hanyang University
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Hong Kyung-ii
Department Of Inorganic Materials Engineering Hanyang University
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Choi Duck-kyun
Department Ceramic Engineering, Hanyang University, Seoul 133-791, Korea
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- Electrical Characterization of Ferroelectric Pb(Zr, Ti)O3 Thin Films Deposited on Pt-Coated RuO2 Electrodes
- Cantilever Type Lead Zirconate Titanate Microactuator Utilizing Ruthenium Oxide
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- Fabrication and Characterization of Pb(Zr,Ti)O3 Microcantilever for Resonance Sensors
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- Auger Electron Spectroscopy Study on the Tolerance to Forming Gas Anneal of (Ba, Sr)TiO3 with SiO2 capped (Ba, Sr)RuO3 Electrode
- Cantilever Type Lead Zirconate Titanate Microactuator Utilizing Ruthenium Oxide