Electrical Characterization of Ferroelectric Pb(Zr, Ti)O3 Thin Films Deposited on Pt-Coated RuO2 Electrodes

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概要

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• Ferroelectric Pb(Zr, Ti)O3 [PZT] thin films deposited on Pt-coated RuO2 electrodes are found to have concurrent advantages in both fatigue and leakage current characteristics. Perovskite phase of PZT having a random orientation was obtained on as-deposited and Pt-coated RuO2 bottom electrodes and the crystallinity increased slightly when the PZT films were deposited on Pt-coated RuO2. PZT films with hillock-free and fine-grained microstructures resulted in all the cases. The PZT films on hybrid electrodes (Pt/RuO2) showed a typical P–E hysteresis loop. PZT films in all the cases did not exhibit fatigue until over 1010 switchings regardless of the bottom electrodes. The asymmetric I–V curve of a PZT thin film on Pt/RuO2 exhibited the Schottky behavior, which indicates that blocking contact is formed at the interface between PZT films and hybrid electrodes. The leakage current density of the PZT thin films on as-deposited and 30-nm-thick Pt-coated RuO2 at 75 kV/cm was 4.73×10-6 and 9.55×10-7 A/cm2, respectively.

• Publication Office, Japanese Journal of Applied Physics, Faculty of Science, University of Tokyoの論文
• 1998-06-15

著者

• CHOI Duck-Kyun

  Department of Inorganic Materials Engineering, CPRC (Ceramic Processing Research Center), Hanyang Un

• Choi Duck-kyun

  Department Of Ceramic Engineering Hanyang University

• Choi Duck-kyun

  Department Of Inorganic Materials Engineering Hanyang University

• JEON Min-Seok

  Department of Inorganic Materials Engineering, CPRC, Hanyang University

• Jeon Min-seok

  Department Of Inorganic Materials Engineering Hanyang University

• LEE Jae-Bok

  Department of Ceramic Engineering, Hanyang University

• Lee Jae-bok

  Department Of Ceramic Engineering Hanyang University

• Lee Jae-bok

  Department Of Inorganic Materials Engineering Hanyang University

• Choi Duck-kyun

  Department Ceramic Engineering, Hanyang University, Seoul 133-791, Korea

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