Two-Dimensional Nonequilibrium Plasma Modeling Based on the Particle-Boltzmann Hybrid Model for RF Glow Discharges

概要

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A two-dimensional self-consistent nonequilibrium numerical method based on the particle and Boltzmann equation hybrid model has been developed to study the radio-frequency (rf) glow discharge. In this paper, the presented particle-Boltzmann hybrid model has been applied to two types of rf glow discharge. One is the parallel-plate capacitively coupled plasma (CCP) of Ar gas. The model predicted the spatial profile of Ar(3p5) density, which shows good agreement with the experimental emission profile of ArI (λ=419.8 nm). The other is the ladder electrode inductively coupled plasma (LICP) of SiH4 gas. It is found that electrons obtain their energy from both the electrostatic field enhanced by the edge effect and the induced electric field.
1997-07-30