Two-Dimensional Nonequilibrium Plasma Modeling Based on the Particle-Boltzmann Hybrid Model for RF Glow Discharges
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概要
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A two-dimensional self-consistent nonequilibrium numerical method based on the particle and Boltzmann equation hybrid model has been developed to study the radio-frequency (rf) glow discharge. In this paper, the presented particle-Boltzmann hybrid model has been applied to two types of rf glow discharge. One is the parallel-plate capacitively coupled plasma (CCP) of Ar gas. The model predicted the spatial profile of Ar(3p5) density, which shows good agreement with the experimental emission profile of ArI (λ=419.8 nm). The other is the ladder electrode inductively coupled plasma (LICP) of SiH4 gas. It is found that electrons obtain their energy from both the electrostatic field enhanced by the edge effect and the induced electric field.
- 1997-07-30
著者
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TAKEUCHI Yoshiaki
Nagasaki Research & Development Center, Mitsubishi Heavy Industries Ltd.
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MURATA Masayoshi
Nagasaki Research & Devepolment Center, Mitsubishi Heavy Industries Ltd.
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Takeuchi Yoshiaki
Nagasaki Research & Development Center, Mitsubishi Heavy Industries, Ltd.,
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Satake Koji
Advanced Technology Research Center, Mitsubishi Heavy Industries, Ltd.,
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Monaka Toshiaki
Advanced Technology Research Center, Mitsubishi Heavy Industries, Ltd.,
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Ukai Osamu
Advanced Technology Research Center, Mitsubishi Heavy Industries, Ltd.,
関連論文
- Characteristics of Very High Frequency Plasma Produced with Ladder-Shaped Electrode at High Pressure
- Characteristics of Very-High-Frequency-Excited SiH_4 Plasmas using a Ladder-Shaped Electrode
- Characteristics of Very High Frequency Plasma Produced Using a Ladder-Shaped Electrode
- Production of Inductively Coupled RF Plasma Using a Ladder-Shaped Antenne
- ECR Plasma CVD in Different Magnetic Field Configurations
- Two-Dimensional Nonequilibrium Plasma Modeling Based on the Particle-Boltzmann Hybrid Model for RF Glow Discharges
- Production of Inductively Coupled RF Plasma Using a Ladder-Shaped Antenna