Resistivity Correction Factor for the Four-Probe Method: Experiment II
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概要
- 論文の詳細を見る
Experimental verification of the theoretically derived resistivity correction factor $F$ is presented. Factor $F$ can be applied to a system consisting of a disk sample and a four-probe array. Measurements are made on isotropic graphite disks and crystalline ITO films. Factor $F$ can correct the apparent variations of the data and lead to reasonable resistivities and sheet resistances. Here factor $F$ is compared to other correction factors; i.e. $F_{\text{ASTM}}$ and $F_{\text{JIS}}$.
- INSTITUTE OF PURE AND APPLIED PHYSICSの論文
- 1989-05-20
著者
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Enjoji Hideo
Electronic Materials And Devices Department Mitsubishi Petrochemical Co. Ltd.
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Yamaguchi Shoji
Advanced Materials Laboratory Mitsubishi Petrochemical Co. Ltd.
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Yamashita Masato
Department Of Electrical Engineering Faculty Of Engineering Nagoya University
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Kurihara Hiroshi
Electronic Materials and Devices Department, Mitsubishi Petrochemical Co. Ltd., Tokyo 100
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Nishii Toshifumi
Advanced Materials Laboratory, Mitsubishi Petrochemical Co. Ltd., Yokkaichi 510
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Enjoji Hideo
Electronic Materials and Devices Department, Mitsubishi Petrochemical Co. Ltd., Tokyo 100
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Yamashita Masato
Department of Electronic Engineering, Ibaraki University, Hitachi 316
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