Resistivity Correction Factor for the Four-Probe Method : Experiment I
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概要
- 論文の詳細を見る
Experimental verification of the theoretically derived resistivity correction factor (RCF) is presented. Resistivity and sheet resistance measurements by the four-probe method are made on three samples: isotropic graphite, ITO film and Au film. It is indicated that the RCF can correct the apparent variations of experimental date to yield reasonable resistivities and sheet resistances.
- 社団法人応用物理学会の論文
- 1988-05-20
著者
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YAMASHITA Masato
Department of Electrical Engineering, University of Industrial Technology
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ENJOJI Hideo
Electronic Materials and Devices Department, Mitsubishi Petrochemical Co. Ltd.
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Enjoji Hideo
Electronic Materials And Devices Department Mitsubishi Petrochemical Co. Ltd.
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Yamaguchi Shoji
Advanced Materials Laboratory Mitsubishi Petrochemical Co. Ltd.
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Yamashita Masato
Department Of Electrical Engineering Faculty Of Engineering Nagoya University
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Yamashita Masato
Department Of Electronic Engineering Ibaraki University
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