Soft X-Ray Responsivities of Fully Depleted Back-Illuminated Charge-Coupled Device
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概要
- 論文の詳細を見る
We have measured the soft X-ray responsivities of a fully depleted back-illuminated (BI) charge-coupled device (CCD). We constructed a soft X-ray beam line for this purpose and confirmed that we irradiated K lines of carbon, oxygen, and aluminum. We operated the BI CCD in a photon-counting mode with a low-noise condition sufficient to resolve these K lines. We clearly resolved the carbon K line with the BI CCD. Because the mean absorption length of carbon K X-rays is 0.11 μm in silicon, we confirmed that our BI CCD operates in a fully depleted condition. We obtained a good linear relationship between peak pulse height and incident X-ray energy. The energy resolution can be explained by the Fano factor, the readout noise, and a small number of additional unknown noise components.
- Japan Society of Applied Physicsの論文
- 2006-06-25
著者
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Miyata Emi
Department Of Earth And Space Science Graduate School Of Science Osaka University
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Suzuki Hisanori
Solid State Division Hamamatsu Photonics K.k.
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TOHIGUCHI Masakuni
Department of Earth and Space Science, Graduate School of Science, Osaka University
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MURAMATSU Masaharu
Solid State Division, Hamamatsu Photonics K.K.
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Matsuura Daisuke
Department Of Earth And Space Science Graduate School Of Science Osaka University
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Ikegami Kazuhiro
Department Of Earth And Space Science Graduate School Of Science Osaka University
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Ozawa Hideki
Department Of Cardiology Tokai University School Of Medicine
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Miyaguchi Kazuhisa
Solid State Division Hamamatsu Photonics K. K.
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Ikegami Kazuhiro
Department of Earth and Space Science, Graduate School of Science, Osaka University, 1-1 Machikaneyama, Toyonaka, Osaka 560-0043, Japan
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TSUNEMI Hiroshi
Department of Astrophysics, Faculty of Science, Osaka University
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Suzuki Hisanori
Solid State Division, Hamamatsu Photonics K.K., 1126-1 Ichino-cho, Hamamatsu, Shizuoka 435-8558, Japan
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Ozawa Hideki
Department of Earth and Space Science, Graduate School of Science, Osaka University, 1-1 Machikaneyama, Toyonaka, Osaka 560-0043, Japan
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Tsunemi Hiroshi
Department of Earth and Space Science, Graduate School of Science, Osaka University, 1-1 Machikaneyama, Toyonaka, Osaka 560-0043, Japan
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Miyaguchi Kazuhisa
Solid State Division, Hamamatsu Photonics K.K., 1126-1 Ichino-cho, Hamamatsu, Shizuoka 435-8558, Japan
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Tohiguchi Masakuni
Department of Earth and Space Science, Graduate School of Science, Osaka University, 1-1 Machikaneyama, Toyonaka, Osaka 560-0043, Japan
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MIYATA Emi
Department of Astrophysics, Faculty of Science, Osaka University
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Muramatsu Masaharu
Solid State Division, Hamamatsu Photonics K.K., 1126-1 Ichino-cho, Hamamatsu, Shizuoka 435-8558, Japan
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