Direct Drawing of Ag Microwiring by Laser-Induced Pyrolysis of Film Prepared from Liquid-Dispersed Metal Nanoparticles
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概要
- 論文の詳細を見る
Ag microwiring with submicron resolution was fabricated by the laser-induced pyrolysis of a film prepared from liquid-dispersed Ag nanoparticles. The linewidth of the wiring fabricated by this laser direct-write maskless technique can be controlled flexibly by the laser beam focusing conditions. The resistivity of the Ag wiring fabricated by this technique ($1.9\times 10^{-6}$ $\Omega$ cm) is comparable with that of bulk Ag ($1.6\times 10^{-6}$ $\Omega$ cm).
- Japan Society of Applied Physicsの論文
- 2005-05-10
著者
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Kobayashi Yoshio
Department of Biomolecular Functional Engineering, College of Engineering, Ibaraki University
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Miwa Takao
Hitachi Research Laboratory Hitachi Ltd.
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YAMADA Shinji
Advanced Research Laboratory, Hitachi, Ltd.
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Konno Mikio
Department Of Chemical Engineering Graduate School Of Engineering Tohoku University
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Watanabe Akira
Institute For Chemical Reaction Science Tohoku University
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Yamada Shinji
Advanced Research Laboratory, Hitachi, Ltd., 7-1-1 Omika-cho, Hitachi, Ibaraki 319-1292, Japan
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Kobayashi Yoshio
Department Cardiovascular Science and Medicine, Chiba University Graduate School of Medicine
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