Micro-patterning of Lead Zirconate Titanate Thin Films Seeded with Barium Strontium Titanate Nano-crystalline Particles by Photo-irradiation
スポンサーリンク
概要
- 論文の詳細を見る
Lead zirconate titanate (PZT) thin films seeded with barium strontium titanate (BST) nano-crystalline particles were fabricated on a Si wafer with a spin-coating technique. The BST particles synthesized with a sol-gel method were dispersed in an acetylacetone (chelating reagent) modified PZT precursor solution of complex alkoxides for the fabrication. The micro-patterns of the PZT film containing 50 mol% BST particles could be obtained by the direct photo-irradiation to the fabricated films for 40 min without any pre-heating treatments, while the PZT films in the absence of the BST particles required pre-heating treatment at 200°C for 10 s before the photo-irradiation. This suggested that the BST crystallines accelerated decomposition of the chelate compounds and subsequent polycondensation of PZT alkoxides.
- 社団法人 化学工学会の論文
- 2004-05-01
著者
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Kobayashi Yoshio
Department of Biomolecular Functional Engineering, College of Engineering, Ibaraki University
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渡辺 明
東北大多元研
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WATANABE Akira
Institute for Chemical Reaction Science, Tohoku University
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MIWA Takao
Hitachi Research Laboratory, Hitachi, Ltd.
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Miwa Takao
Hitachi Research Laboratory Hitachi Ltd.
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KONNO Mikio
Department of Chemical Engineering, Graduate School of Engineering, Tohoku University
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TANASE Tomokazu
Department of Chemical Engineering, Graduate School of Engineering, Tohoku University
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Konno M
Department Of Chemical Engineering Graduate School Of Engineering Tohoku University
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Konno Mikio
Department Of Chemical Engineering Graduate School Of Engineering Tohoku University
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Yoshio Kobayashi
Department Of Biomolecular Functional Engineering College Of Engineering Ibaraki University
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Tanase Tomokazu
Department Of Chemical Engineering Graduate School Of Engineering Tohoku University
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Kobayashi Yoshio
Department Of Chemical Engineering Graduate School Of Engineering Tohoku University
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Watanabe Akira
Institute Of Multidisciplinary Research For Advanced Materials Tohoku University
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Watanabe Akira
Institute For Chemical Reaction Science Tohoku University
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Kobayashi Yoshio
Department Cardiovascular Science and Medicine, Chiba University Graduate School of Medicine
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