Low Temperature Processing of Crystalline Lead Zirconate Titanate (PZT) Film and the Direct Micropatterning by Laser-Induced Pyrolysis of a Sol-Gel-Derived Film
スポンサーリンク
概要
- 論文の詳細を見る
A novel low-temperature processing of crystalline lead zirconate titanate (PZT) film was developed. The beam from an Ar ion laser was focused and scanned on the sol-gel derived film, and it induced pyrolysis of the precursor film with spatially selectivity. Development of the film using an acidic solution gave the PZT micropattern. The Raman spectrum of the micropattern exhibited the characteristics of crystalline PZT.
- Japan Society of Applied Physicsの論文
- 2003-07-15
著者
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Kobayashi Yoshio
Department of Biomolecular Functional Engineering, College of Engineering, Ibaraki University
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Miwa Takao
Hitachi Research Laboratory Hitachi Ltd.
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Konno Mikio
Department Of Chemical Engineering Graduate School Of Engineering Tohoku University
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Yamada Shinji
Hitachi. Ltd. Advanced Research Laboratory
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Tanase Tomokazu
Department Of Chemical Engineering Graduate School Of Engineering Tohoku University
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Watanabe Akira
Institute For Chemical Reaction Science Tohoku University
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Watanabe Akira
Institute of Multidisciplinary Research for Advanced Materials, Tohoku University, 2-1-1 Katahira, Aoba-ku, Sendai 980-8577, Japan
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Kobayashi Yoshio
Department of Chemical Engineering, Tohoku University, Aoba Aramaki, Sendai 980-8579, Japan
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Yamada Shinji
Hitachi Research Laboratory, Hitachi, Ltd., 7-1-1 Omika-cho, Hitachi, Ibaraki 319-1292, Japan
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Tanase Tomokazu
Department of Chemical Engineering, Tohoku University, Aoba Aramaki, Sendai 980-8579, Japan
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Kobayashi Yoshio
Department Cardiovascular Science and Medicine, Chiba University Graduate School of Medicine
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