3波長ワンショット干渉計測によるインクジェット方式カラーフィルタの膜厚測定

概要

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An automatic thickness measurement system has been developed for ink-jet based color filter manufacturing process. The RGB cell thickness is calculated from surface profile data measured by three-wavelength single-shot interferometry. Since this method is very robust against vibration, the system does not require an expensive anti-vibration mechanism. For this development, the following techniques have been developed : (a) three wavelength illumination system using multi-bandpass optical filter, (b) automatic alignment algorithm using phase images, (c) automatic focusing method using the profile data, (d) parallel computation by GPU, and (e) phase unwrapping using look-up-table method. The speed is 1.5s per FOV(Field of View) and measurement repeatability is approximately 1nm.