High Deposition Rate of Diamond-like Carbon on Trench Bottom for Acetylene Gas at Plasma Immersion and Deposition Process
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概要
- 論文の詳細を見る
A bright optical emission inside a trench in a solid object was observed during a diamond-like carbon (DLC) deposition process, with the DLC deposition rate being more than two-times faster on the trench's bottom than that on the top of the trench. We found that the secondary electrons inside the trench played an important role in the higher DLC deposition rate on the trench's bottom.
- 社団法人 プラズマ・核融合学会の論文
著者
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Fujiwara Etsuo
Department Of Electric Engineering Himeji Institute Of Technology
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Azuma Kingo
Department Of Electric Engineering Himeji Institute Of Technology
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Nishikawa Keiichi
Department Of Oral And Maxillofacial Radiology Tokyo Dental College
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Yatsuzuka Mitsuyasu
Department Af Electric Engineering Himeji Institute Of Technology
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AZUMA Kingo
Department of Electrical Engineering and Computer Sciences, Faculty of Engineering, University of Hyogo
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KIRINUKI Michiharu
Department of Electrical Engineering and Computer Sciences, Faculty of Engineering, University of Hyogo
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FUJIWARA Etsuo
Department of Electrical Engineering and Computer Sciences, Faculty of Engineering, University of Hyogo
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YATSUZUKA Mitsuyasu
Department of Electrical Engineering and Computer Sciences, Faculty of Engineering, University of Hyogo
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