プラズマCVD法によるTiN被覆層の硬度におよぼす含有Cl量の影響

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TiN coatings with thicknesses of 4 to 6μm were deposited by the DC glow discharge method from mixed gases of TiCl4, N2, H2 and Ar at a total pressure of 4Torr onto M2 steel and pure iron at temperatures of from 405°C to 600°C.X-ray microanalysis and microvickers hardness measurement revealed a correlation between the composition and hardness of the coatings.The results obtained were as follows: 1) The hardness of the coatings deposited at 550°C and 600°C was more than Hv 2000, while that of coatings deposited below 550°C decreased with decreasing substrate temperature, dropping to Hv 300 at 405°C and 465°C. 2) The chlorine content in the coatings increased with decreasing substrate temperature below 550°C, and amounted to more than 30at. % at 405°C and 465°C. 3) The hardness of the coatings decreased with increasing chlorine content. 4) In coatings containing less than 10at. % chlorine, in which there was a compensative relation between nitrogen and chlorine content, both the titanium and the sum of the nitrogen and chlorine content were constant at 50at. %.
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