プラズマCVD法によるTiC被覆層の硬度におよぼす含有Cl量および過剰C量の影響

概要

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TiC coatings were deposited from mixed gases of TiCl4, CH4, H2 and Ar onto steel by the DC glow discharge method at a total pressure of 4 Torr and temperatures of 430-700°C.Micro Vickers hardness measurement and X-ray microanalysis revealed a correlation between hardness and coating composition. X-ray photoelectron spectroscopy was carried out to investigate the binding state of the elements in the coatings.The results obtained are as follows: 1) The hardness of the coatings varied with the coating conditions, and coatings with Vickers hardness of 2300-3000 were obtained at a TiCl4 flow rate of 3-8mL/min and substrate temperatures of 475-700°C. 2) The hardness of the coatings was determined by chlorine content and excess carbon content, and coatings with Vickers hardness of 2300-3000 contained 5at.% chlorine and 45-60at.% carbon. 3) In coatings with more than 5at.% chlorine, in which there was a compensative relation between the carbon and chlorine content, both the titanium content and the sum of carbon and chlorine content were constant at 50at.%. 4) Incorporation of graphite-like carbon reduced the hardness of the coatings containing excess carbon.