CVD法による軟鋼板上へのZrB2およびTiB2-ZrB2皮膜の生成

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Chemical vapor deposition of ZrB2 and TiB2-ZrB2 composites on mild steel substrates was carried out with the hydorgen reduction of ZrCl4-BCl3 and TiCl4-ZrCl4-BCl3 mixtures.The ZrB2 deposition was carried out at substrate temperatures of 1273K and above, [ZrCl4/ZrCl4+BCl3] gas ratios of 0.33 and above, and Cl/H ratios of 0.13 and below. The deposition of FeB was observed without these conditions.TiB2-ZrB2 composite film was formed at 1273K, and its phase was determined by X-ray diffraction to be ZrB2 within the range of film compositions equivalent to 0-77mol% TiB2. TiB2 phase was identified in compositions of 89mol% TiB2 and above. The lattice constant of the composite film gradually decraesed with an increase in the titanium content of the film, and its sudden drop was observed at the boundary composition of TiB2 and ZrB2 phases.A maximum micro-vickers hardness of about 4600kg·f/mm2 was measured for composite films having the composition of TiB2/ZrB2=1 in molar ratio.
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